石英玻璃具有一系列优良的性能,如纯度高,热膨胀系数小,热稳定性好,软化温度高,低而稳定的超声延迟性能、**的化学稳定性、的透紫外、可见及近红外光谱性能以及良好的耐辐射性能,是无线光通讯行业制备微波滤波器的**基底材料。
石英玻璃在高温、高压和高频电场下,仍能保持高介电强度和电阻,几乎没有损耗,是优良的高温电气**缘材料。
石英晶片常规规格
Regular specifi**ion of Quartz Wafers
Q-Value (X106) 3.0 3 2.4 2.4
Etch ** Density (/cm2) max10 max30 max100 max100
Inclusions Density I I I I or II
A typical SPEC for SAW grade double side polished 4 inch quartz wafer:
Diameter: 100.0 +/-0.2mm
Cutting Orientation: ST, AT, X, Y, Z or others
Surface Quality: Double Side Polished
Thickness: 200+/-50um, 350+/-50um, 500+/-50um
LTV (5mm x 5mm): max 2.5um
Bow: max +/-25um
TTV: max 15um
Wrap: max 35um
PLTV: min 90% less than 1um (5mm x 5mm)
Edge Rounding: **pliant with SEMI M1.2 Standard
Primary/Secondary Flats: **pliant with SEMI M1.2 Standard
Primary Flat: 32.5+/-2mm (perpendicular to X a**s +/- 3º)
Secondary Flat: Yes/No
Roughness: Ra max 10 (Polished Surface Only)
Grinding Surface: Per Customized Requirement
Contamination and Scratch: None